Glass Micromachining

Protron offers microstructures made from fused silica and borofloat glass. Besides common wet etching technologies we offer newest 3D micromachining technologies for the realization of complex glass structures.


  • minimum structure size: 20µm
  • maximum structure size: 120mm x 100mm x 6mm
  • typical roughness: 1µm Rz
  • lateral accuracy: 2µm
  • vertical accuracy: 3µm
  • position accuracy: <1µm
  • 2D and 3D designs possible


  • microstructures in fused silica glass
  • microstructures in borofloat glass
  • 3D microfluidic devices
  • glass fiber alignment structures
  • MEMS capping wafer
  • vacuum gripper tools
  • injection nozzles

Protron offers

  • prototyping
  • production - from small to high volume