Glass Micromachining
Protron offers microstructures made from fused silica and borofloat glass. Besides common wet etching technologies we offer newest 3D micromachining technologies for the realization of complex glass structures.
Specifications
- minimum structure size: 20µm
- maximum structure size: 120mm x 100mm x 6mm
- typical roughness: 1µm Rz
- lateral accuracy: 2µm
- vertical accuracy: 3µm
- position accuracy: <1µm
- 2D and 3D designs possible
Applications
- microstructures in fused silica glass
- microstructures in borofloat glass
- 3D microfluidic devices
- glass fiber alignment structures
- MEMS capping wafer
- vacuum gripper tools
- injection nozzles
Protron offers
- prototyping
- production - from small to high volume
